handler cooling options
electrical air chiller I LN2 heat exchanger I dual electrical air chiller I hybrid chiller

electrical air chiller

• -56 °C (-68 °F) plunger temperature [typically -40 °C (-40 °F) junction temperature]
• LN2 not required
• handler-integrated

LN2 heat exchanger

• -75 °C (-103 °F) plunger temperature [typically -60 °C (-76 °F) junction temperature]
• low LN2 consumption (3.5 h/l in steady state)
• handler-integrated

dual electrical air chiller

• -68 °C (-90 °F) plunger temperature
• LN2 not required
• external second chiller (outside cabinet)

hybrid chiller (electrical + LN2 chiller)

• electrical air chiller for medium cold operations up -56 °C (-68 °F) plunger temperature without LN2
• LN2 heat exchanger for low-temperature operations up to -75 °C
  (-103 °F) plunger temperature